跨尺度精密运动压电平台和快速驱动方法研究

This paper proposed a trans-scale fast-moving piezoelectric platform based on the principle of inertial stick-slip driving. The platform consisted of a sliding part, a frictional adjustment part, a stacked piezoelectric ceramic, an inertial part and a base, and the total size was 60 mm×60 mm×58 mm. The novel inertial stick-slip driving principle based on the proposed structure was introduced in detail. To investigate the driving performance, a prototype was fabricated and an experimental system was set up. In experiment, the maximum single step distance driving frequency is 2.67 μm, the maximum velocity is 22.7 mm/s, and the maximum static retention is 36 N at 7 kHz. The experimental results show that the designed piezoelectric platform designed in this paper has achieved the goal of fast motion and has good motion performance.