自确认金属氧化物半导体气体传感器阵列及其应用研究

Metal-oxide semiconductor(MOS)gas sensor array is an important device for acquiring target gas information in the machine olfactory system. Due to the material properties of the gas component,MOS gas sensor array in the process of working inevitably occurs sudden failure and external disturbance,which will result in detection and analysis performance of machine olfactory system degradation. In order to improve the reliability of machine olfactory system,this paper innovatively presents a self-validating MOS gas sensor array based on the results of the author's previous researches. The gas sensor array combining with self-validating sensor technology can realize self-validating functions such as multi-fault detection and isolation,fault identification,fault recovery and measurement quality evaluation and so on by itself. This paper discusses the hardware architecture,functional models and key technologies of self-validating sensor array. Finally,this paper introduces a self-validating gas sensor array that realizes abnormal condition monitoring and measurement quality evaluation for atmospheric environmental pollution monitoring and verifies its effectiveness.