电-磁场协同增强高功率脉冲磁控放电特性研究

We experimentally addressed the synergistic effect of electric and magnetic fields on ion-current enhancement in the lab-built High Power Impulse Magnetron Sputtering (HiPLMS) reactor.The results show that depending on the HiPIMS voltage,coil excitation current and auxiliary anode orientation,the strong synergistic effect of the E-and M-fields significantly increased the substrate ion-current.To be specific,the synergistic effect,occurring under the proper conditions:at a HiPIMS voltage of 580 V,a coil current of 4 A and an anode voltage over 50 V (or at the anode voltage of 70 V and coil current over 3 A),significantly increased the substrate ion-current.When the auxiliary anode was oriented at 45° with respect to cathode,the largest increased ion-currents were found at a spatial orientation of 0°,45°,90°,135° and 180° because of the synergistic effect.