激光诱导微纳连接技术研究进展

With the development of aviation, electronics and energy technologies, complex electronic devices and systems with low-dimensional nanomaterials as functional units tend to be flexible and miniaturized, and this process depends on the high-quality connections between nanomaterials. The size and structure limitations of micro-nano materials make it difficult for traditional methods such as thermal annealing, mechanical pressing, chemical treatment and electron beam irradiation to avoid the damage of non-joining areas while constructing effective joining. However, laser processing has been widely concerned because of its advantages such as small focal spot size, good monochromaticity and easy accurate control of energy input. In order to clarify the practical application significance and potential application prospect of laser in micro-nano connection field, firstly analyzes the transient interaction mechanism between ultrafast laser and conventional laser in the formation of micro-nano joining, and then summarizes in detail the laser joining strategies of zero-dimensional nanoparticles, one-dimensional nano-wires, two-dimensional nano-films and mixed-dimensional materials, and introduces the application of the network structure obtained by connecting nano-materials in transparent electrodes. Finally, the shortcomings of the current laser micro-nano connection technology are analyzed, and the future development is prospected.