掺 银 硫 系 玻 璃 光 电 探 测 器 响 应 波 长 特 性 研 究

Due to the excellent optical properties of chalcogenide glasses，they have been extensively investigated in nonlinear optics and other fields，but there is little research based on chalcogenide glass photodetectors. In this paper，we used vacuum co-thermal evaporation technology to prepare chalcogenide glass thin films with different silver doped ratios as semiconductor film structure，and designed a self-powered photodetector based on the MIS structure of chalcogenide glass thin films with different silver doped ratios. The response spectrum range of the photodetector was studied，and the results showed that the detector was responsive to light from visible to near infrared regions. The relationship between the response voltage and excitation power was researched for the silver doped chalcogenide glass at 635 nm wavelength laser. For the laser power was less than 10 mW，the response voltage of the photodetector was linearly related to the excitation power. For the laser power was higher than 10 mW，the response voltage of the photodetector appears saturation phenomenon. Moreover，the photodetector exhibits fast light response speed，with rise time and decay time of 3. 932 s and 1. 522 s，respectively. This study indicates that the chalcogenide glass is a promising method for self-powered photodetectors.