多 晶 金 刚 石 散 热 片 制 备 工 艺 研 究

Xiaobin Hao; Yicun Li; Xia Kong; Jilei Lyu; Chufei Cheng; Bing Dai; Huaixin Guo; Jiaqi Zhu

doi:10.12450/j.gtdzx.202406007

多晶金刚石散热片制备工艺研究

Translated title of the contribution: Study on Preparation Technology of Polycrystalline Diamond Heat Sink

Xiaobin Hao
, Yicun Li
, Xia Kong
, Jilei Lyu
, Chufei Cheng
, Bing Dai^*
, Huaixin Guo
, Jiaqi Zhu

^*Corresponding author for this work

School of Astronautics

Harbin Institute of Technology
Hubei Carbon Six Science and Technology Co., Ltd
Nanjing Electronic Devices Institute

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

Polycrystalline diamond heat sinks were prepared by microwave plasma chemical vapor deposition(MPCVD)under different processes,and their thermal conductivity,warpage,surface morphology,crystal orientation and Raman spectra were tested and analyzed. The results show that the growth rate and quality of diamond are greatly affected by methane concentration and growth temperature. Appropriately reducing methane concentration and increasing growth temperature are helpful to prepare high quality polycrystalline diamond heat sinks with low warpage and high thermal conductivity.

Translated title of the contribution	Study on Preparation Technology of Polycrystalline Diamond Heat Sink
Original language	Chinese (Traditional)
Pages (from-to)	556-560
Number of pages	5
Journal	Guti Dianzixue Yanjiu Yu Jinzhan/Research and Progress of Solid State Electronics
Volume	44
Issue number	6
DOIs	https://doi.org/10.12450/j.gtdzx.202406007
State	Published - Dec 2024

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10.12450/j.gtdzx.202406007

Cite this

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title = "多晶金刚石散热片制备工艺研究",

abstract = "Polycrystalline diamond heat sinks were prepared by microwave plasma chemical vapor deposition(MPCVD)under different processes,and their thermal conductivity,warpage,surface morphology,crystal orientation and Raman spectra were tested and analyzed. The results show that the growth rate and quality of diamond are greatly affected by methane concentration and growth temperature. Appropriately reducing methane concentration and increasing growth temperature are helpful to prepare high quality polycrystalline diamond heat sinks with low warpage and high thermal conductivity.",

keywords = "MPCVD, diamond, heat dissipation",

author = "Xiaobin Hao and Yicun Li and Xia Kong and Jilei Lyu and Chufei Cheng and Bing Dai and Huaixin Guo and Jiaqi Zhu",

year = "2024",

month = dec,

doi = "10.12450/j.gtdzx.202406007",

language = "繁体中文",

volume = "44",

pages = "556--560",

journal = "Guti Dianzixue Yanjiu Yu Jinzhan/Research and Progress of Solid State Electronics",

issn = "1000-3819",

publisher = "Research Progress of Solid State Electronics",

number = "6",

}

TY - JOUR

T1 - 多晶金刚石散热片制备工艺研究

AU - Hao, Xiaobin

AU - Li, Yicun

AU - Kong, Xia

AU - Lyu, Jilei

AU - Cheng, Chufei

AU - Dai, Bing

AU - Guo, Huaixin

AU - Zhu, Jiaqi

PY - 2024/12

Y1 - 2024/12

N2 - Polycrystalline diamond heat sinks were prepared by microwave plasma chemical vapor deposition(MPCVD)under different processes,and their thermal conductivity,warpage,surface morphology,crystal orientation and Raman spectra were tested and analyzed. The results show that the growth rate and quality of diamond are greatly affected by methane concentration and growth temperature. Appropriately reducing methane concentration and increasing growth temperature are helpful to prepare high quality polycrystalline diamond heat sinks with low warpage and high thermal conductivity.

AB - Polycrystalline diamond heat sinks were prepared by microwave plasma chemical vapor deposition(MPCVD)under different processes,and their thermal conductivity,warpage,surface morphology,crystal orientation and Raman spectra were tested and analyzed. The results show that the growth rate and quality of diamond are greatly affected by methane concentration and growth temperature. Appropriately reducing methane concentration and increasing growth temperature are helpful to prepare high quality polycrystalline diamond heat sinks with low warpage and high thermal conductivity.

KW - MPCVD

KW - diamond

KW - heat dissipation

UR - https://www.scopus.com/pages/publications/85215408373

U2 - 10.12450/j.gtdzx.202406007

DO - 10.12450/j.gtdzx.202406007

M3 - 文章

AN - SCOPUS:85215408373

SN - 1000-3819

VL - 44

SP - 556

EP - 560

JO - Guti Dianzixue Yanjiu Yu Jinzhan/Research and Progress of Solid State Electronics

JF - Guti Dianzixue Yanjiu Yu Jinzhan/Research and Progress of Solid State Electronics

IS - 6

ER -

多晶金刚石散热片制备工艺研究

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多 晶 金 刚 石 散 热 片 制 备 工 艺 研 究

Abstract

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多晶金刚石散热片制备工艺研究