基 于 光 学 显 微 视 觉 的 精 密 定 位 测 量 综 述

Precision positioning measurements are performed to achieve micro^- and nano^-accuracy in positioning and smallscale manipulation for microscale objects. This technology plays a crucial role in various high^-end industries, including industrial production and semiconductor manufacturing. Owing to their versatility and interactive capabilities, optical microvision^-based measurement techniques are widely employed in precision positioning. This paper presents an analysis and synthesis of precision positioning measurement techniques based on optical micro vision. First, we introduced the imaging models and operational principles of optical micro^-vision systems. Then, microlocalization measurement algorithms were categorized based on their reliance on target patterns. Additionally, these algorithms were classified and explored based on the periodic characteristics of target patterns. Moreover, the performance metrics of positioning measurement algorithms for different target patterns were discussed. Finally, the applications and future prospects of optical microvision^-based precision positioning measurement methods across various domains were summarized. This review provides researchers insights into the current state and emerging trends in optical microvision^-based precision positioning measurement technology, thereby advancing the field of microscale/nanoscale positioning measurement.