半球谐振子关键性能及制造工艺研究新进展

Since hemispherical resonator gyroscope (HRG) is characterized with simple structure, high accuracy, high reliability, and long service life, the potential applications of HRG are becoming increasing widespread, including national defense, communication satellite, human spaceflight, astronomical observation, ocean engineering, etc. As the hemispherical resonator is core component of HRG, the processing quality of resonator directly determines the frequency splitting and quality factor of the hemispherical resonator, which then affects the working accuracy and service life of HRG. Therefore, investigating the key properties and manufacturing technology of hemispherical resonator is of great necessity. The working principle and research history of HRG, the frequency splitting and quality factor of hemispherical resonator, and the manufacturing process of hemispherical resonator are reviewed. The research methods and latest progress in frequency splitting and quality factor, the hemispherical resonator ultra-precision grinding and magnetorheological polishing process are emphatically analyzed. What’s more, the challenges and problems still to be solved in the course of future development are discussed. By summarizing what is mentioned above, references are provided for subsequent works, such as accurate calculation and measurement of the frequency splitting and quality factor of hemispherical resonator, the optimization of hemispherical resonator manufacturing process, and the improvement of HRG navigation accuracy.